A vibration based mechanical ir detector and an ir imaging method using the same

ABSTRACT

The invention relates to a vibration based mechanical IR detector having one or more than one resonating pixel structure and an IR imaging method for measuring incoming IR radiation by means of mechanical resonance of the resonating pixels.

RELATED FIELD OF THE INVENTION

The invention relates to a vibration based mechanical IR detector having one or more than one resonating pixel structure and an IR imaging method for measuring incoming IR radiation by means of mechanical resonance of the resonating pixels.

BACKGROUND OF THE INVENTION (PRIOR ART)

Infrared (IR) detectors are sensors that convert incident IR radiation to an easy-to-process form of information (electrical voltage or current, deflection, etc). IR detectors have a wide span of applications including night vision and remote (contactless) temperature measurements. There are several types of IR detectors, mainly grouped under quantum infrared detectors and thermal infrared detectors.

Despite providing very high performance, quantum IR detectors of the prior art need cryogenic temperatures to operate which makes them costly and bulky devices.

On the other hand, thermal IR detectors of the prior art, usually called “bolometers”, does not need cryogenic temperatures to operate and can be manufactured using MEMS fabrication techniques.

Bolometers operate on the idea of measuring the temperature change of the surface which the incident IR radiation heats. There have been demonstrated various bolometer topologies with;

-   -   temperature dependent resistors, where the resistivity of a         resistor changes with the temperature (IR→ΔT→ΔR→ΔV),     -   temperature dependent diodes, where the turn-on voltage of the         diode changes with the temperature (IR→ΔT→ΔV),     -   thermal expansion based capacitive structures, where the         increasing/decreasing temperature varies the gap of a capacitor         structure (IR→ΔT→ΔC→ΔV).

One problem with these bolometers is the saturation of the readout electronics due to self heating. Another drawback is the need of an ADC (analog-to-digital converter) to make the pixel data available for digital processing. ADC adds complexity and noise to the readout electronics with increased die area.

As an example of thermal IR detectors of the prior art, US 2004/0140428 A1 defines a pixel structure, forming one element of a focal plane array, including a bolometer having a detector and an insulator for measuring the incoming IR radiation by means of measuring the temperature change of the surface pixel structure.

In addition, US 2013/206988 A1 can also be an example of the thermal IR detectors of prior art. In US 2013/206988 A1, a detector having organic layers that can be utilized to produce a phototransistor for the detection of IR radiation is defined. The wavelength range of the defined IR detector can be modified by incorporating materials sensitive to photons of different wavelengths according to the invention. It has also been claimed that a photoconductor structure can be used instead of a phototransistor where the photoconductor can incorporate PbSe or PbS quantum dots and organic materials as part of an OLED structure. A detected IR image can be displayed to a user as the organic materials can be used to create an organic light-emitting device according to the invention.

BRIEF DESCRIPTION AND AIMS OF THE INVENTION

The present invention defines a method of measuring incoming IR radiation by means of mechanical resonance of pixels and a vibration based mechanical IR detector based on the said resonating pixel structure.

The method of the present invention can be interpreted similar to the thermal sensitivity of the resistivity of a resistor where the resonance frequencies of the mode shapes of a mechanical structure is also dependent on the temperature.

The main aim of this method is to measure the shift in the resonance frequency of an adequately designed resonator in the presence of IR radiation.

The proposed structures of the present invention enable not only the precise measurement of incident IR power but also the adjustment of sensitive wavelength of the detector structure.

The detector of the present invention can be fabricated as a single pixel for remote temperature detection, or as a Focal Plane Array (FPA) for an IR camera application.

The aims of this vibration, based mechanical IR detector and the IR imaging method of the present invention are;

-   -   To adjust and fine tune the dynamic range and resolution as in         the frequency based sensors,     -   Eliminating the need for an analogue to digital converter as the         frequency is a countable parameter,     -   Over 100 image count per second,     -   To create a vibration based mechanical IR detector that can be         manufactured by using MEMS (Micro Electro Mechanical Systems)         and/or integrated circuit techniques,     -   Eliminating the need for cryogenic cooling systems as in the         quantum IR detectors,     -   To increase the measurement range and accuracy of the pixel,     -   Creating higher resolution detectors having the same sensor         array surface by measuring the IR radiation with smaller pixels,     -   Creating energy efficient IR detectors in comparison with prior         art IR detectors,     -   Creating smaller and more compact IR detectors in comparison         with prior art IR detectors,     -   Rendering a pixel to measure smaller temperature differences,     -   To increase the application flexibility by making the detector's         individual pixels resonant wavelength adjustable using a         variable resonant cavity.

DEFINITION OF THE FIGURES

In order to explain the present invention in more detail, the following figures have been prepared and attached to the description. The list and the definition of the figures are given below.

FIG. 1 is the top view of the 4 corners fixed pixel

FIG. 2 is the isometric view of the 4 corners fixed pixel

FIG. 3 is the isometric deflection pattern view of the 1^(st) mode shape of the 4 corners fixed pixel

FIG. 4 is the isometric deflection pattern view of the 4^(th) mode shape of the 4 corners fixed pixel

FIG. 5 is the isometric deflection pattern view of the 6^(th) mode shape of the 4 corners fixed pixel

FIG. 6 is the isometric deflection pattern view of the 11^(th) mode shape of the 4 corners fixed pixel

FIG. 7 is the top view of the 4 edges segment-fixed pixel

FIG. 8 is the isometric view of the 4 edges segment-fixed pixel

FIG. 9 is the isometric deflection pattern view of the 1^(st) mode shape of the 4 edges segment-fixed pixel

FIG. 10 is the isometric deflection pattern view of the 11^(th) mode shape of the 4 edges segment-fixed pixel

FIG. 11 is the top view of the cantilever type pixel

FIG. 12 is the isometric view of the cantilever type pixel

FIG. 13 is the isometric deflection pattern view of the 1^(st) mode shape of the cantilever type pixel

FIG. 14 is the isometric deflection pattern view of the 3^(rd) mode shape of the cantilever type pixel

FIG. 15 is the top view of the 2 edges fixed cantilever type pixel

FIG. 16 is the isometric view of the 2 edges fixed cantilever type pixel

FIG. 17 is the isometric deflection pattern view of the 1^(st) mode shape of the 2 edges fixed pixel

FIG. 18 is the isometric deflection pattern view of the 2^(nd) mode shape of the 2 edges fixed pixel

FIG. 19 is the isometric deflection pattern view of the 3^(rd) mode shape of the 2 edges fixed pixel

FIG. 20 is the isometric deflection pattern view of the 4^(th) mode shape of the 2 edges fixed pixel

FIG. 21 is the top view of the center fixed pixel

FIG. 22 is the isometric view of the center fixed pixel

FIG. 23 is the isometric deflection pattern view of the 5^(th) mode shape of the center fixed pixel

FIG. 24 is the isometric deflection pattern view of the 6^(th) mode shape of the center fixed pixel

FIG. 25 is the isometric deflection pattern view of the 10^(th) mode shape of the center fixed pixel

FIG. 26 is the top view of the 2 edges segmented-fixed pixel

FIG. 27 is the isometric view of the 2 edges segmented-fixed pixel

FIG. 28 is the isometric deflection pattern view of the 1^(st) mode shape of the 2 edges segmented-fixed pixel

FIG. 29 is the isometric deflection pattern view of the 3^(rd) mode shape of the 2 edges segmented-fixed pixel

FIG. 30 is the isometric deflection pattern view of the 5^(th) mode shape of the 2 edges segmented-fixed pixel

FIG. 31 is the top view of the 2 corners fixed pixel

FIG. 32 is the isometric view of the 2 corners fixed pixel

FIG. 33 is the isometric deflection pattern view of the 5^(th) mode shape of the 2 corners fixed pixel

FIG. 34 is the isometric deflection pattern view of the 12^(th) mode shape of the 2 corners fixed pixel

FIG. 35 is the isometric deflection pattern view of the 14^(th) mode shape of the 2 corners fixed pixel

FIG. 36 is the top view of the 2 edges segmented-fixed with long arms pixel

FIG. 37 is the isometric view of the 2 edges segmented-fixed with long arms pixel

FIG. 38 is the isometric deflection pattern view of the 9^(th) mode shape of the 2 edges segmented-fixed with long arms pixel

FIG. 39 is the isometric deflection pattern view of the 12^(th) mode shape of the 2 edges segmented-fixed with long arms pixel

FIG. 40 is the isometric deflection pattern view of the 13^(th) mode shape of the 2 edges segmented-fixed with long arms pixel

FIG. 41 is the isometric view of a complete center fixed pixel

FIG. 42 is the isometric view of the vibration based IR detector in pixel array form

DEFINITION OF THE ELEMENTS (FEATURES/COMPONENTS/PARTS) ON THE FIGURES

The definition of the features/components/parts which are covered in the figures that are prepared in order to explain the present invention better are separately numbered and given below.

-   -   1. Complete pixel structure     -   2. Resonating pixel plate     -   3. Pixel substrate     -   4. Anchor     -   5. Extension arm     -   6. Cantilever     -   7. Electrical connection pad     -   8. Driving capacitive electrode     -   9. Sensing capacitive electrode     -   10. Vibration based mechanical IR detector

DETAILED DESCRIPTION OF THE INVENTION

The present invention is based on five key aspects of the proposed mechanical resonance based IR detector:

-   -   Mechanical structure of the pixel and corresponding mode shapes,     -   Materials that the pixel structure is made up of,     -   Actuation and detection of mechanical resonance,     -   Detection of frequency shift of the mechanical resonance,     -   On-the-fly tuning of sensitive wavelength band by means of a         resonant light cavity.         Mechanical structures and corresponding mode shapes:

Mechanical structure of the pixel (1) of the vibration based IR detector is composed of a resonating pixel plate (2), a pixel substrate (3) where the plate (2) is attached to, one or more anchors (4) and/or extension arms (5) and one or more cantilevers (6) that are attaching the plate (2) to the substrate (3).

In regard to different embodiments of the invention, upper and/or lower surfaces of this pixel plate (2) can be coated with an IR absorbing material.

The mode shapes are totally dependent on the shape of the plate (2) and the boundary conditions like size and positions of the extension arms (5) and anchorage (4) regions.

The temperature dependency of the mode shape frequencies has two different sources. Temperature changes affect both the size of the pixel structure (1) and the Young's Modula of the materials which the pixel structure (1) is made up of.

-   -   Change in the geometric dimensions (expansion based): Changing         the geometric dimensions of the pixel structure (1), especially         when the thermal expansion coefficients of in-contact materials         are considerably different, results in internal stresses within         the structure (1), yielding a change in the structural stiffness         and hence a shift in the resonance frequency.     -   Temperature dependent Young's Modulus change: This directly         alters the stiffness of the pixel structure (1) material and         thus a shift in the resonance frequency.

In the present invention 7 different plate (2)—anchor (4)/extension arm (5) combinations are explained as different embodiments of the invention:

-   -   4 corners fixed     -   2 corners fixed     -   4 edges segment-fixed     -   2 edges segment-fixed     -   Cantilever     -   2 edges fixed     -   Center fixed

All these combinations and their operational mode shapes are given in detail in FIGS. 1 to 40. These embodiments utilize a combined “expansion based” and “Thermal Coefficient of Young's Modulus based” frequency shifts.

The operation of this vibration based IR detector is also based on the incident IR radiation power that heats the resonating pixel plate (2) of which the resonance frequency shifts according to the mechanisms explained above. The thermal energy absorbed by the plate (2) has 3 means of dissipation:

-   -   1. Conductive     -   2. Convective     -   3. Radiative

Among these, with vacuum ambient of the pixel structure (1), only conductive heat loss is significant. To have higher resolution, the plate (2) should be thermally isolated from the substrate (3) it sits on. For this purpose, extension arm (5) structures are used for extending the anchorage regions of the pixel plates (2) in order to increase thermal resistance between the plate (2) and the substrate (3). FIGS. 36-40 show 2 edges segment-fixed pixel structure (1) with extension arms (5), improving the sensitivity of the detector (more frequency shift per incident IR power). Remaining 6 plate-anchor combinations can also be implemented with extension arm (5) structures.

Mechanical structure of the preferred embodiment of the present invention is a center fixed pixel (2).

Materials that the Pixel Structure is Made Up of:

To maximize the performance of the detector, material selection is critical.

For maximum sensitivity, resonating pixel plate (2), which is the deforming body of the pixel structure (1), should have high thermal coefficient of Young's Modulus and high thermal coefficient of expansion while the thermal conductivity of the pixel plate (2) and the anchors (4) or extension arms (5) should be as low as possible.

In order to improve the quality factor of the mode shapes, the pixel plate (2) should also be made up of a low-loss material such as a single crystal silicon or quartz. In addition, glass anchors (4), extension arms (5) and/or cantilevers (6) are most suitable for the preferred embodiment of the present invention.

Use of MEMS fabrication techniques is best suited for the fabrication of such detectors. FIG. 41 shows isometric view of the preferred embodiment of the present invention as a complete pixel structure (1), where the substrate (3) is glass with metal padding on top. The resonating pixel plate (2) is made up of silicon and is attached to the substrate (3) via a glass anchor (4) in the middle. On top of the pixel plate (2), a coating with high IR absorptivity is deposited. This layer can be of TiN (Titanium Nitride) or very thin metal or metal alloy that matches the impedance of free space (˜377 Ohm).

A similar structure can be obtained in another embodiment of the present invention by using float zone silicon as the substrate (3) and the metal padding on top. The resonating pixel plate (2) can be bonded on a conductive anchor (4), which provides the bias potential to the resonating pixel plate (2). These fabrication techniques are not the only two options and these fabrication techniques can be applied for other structures within the present invention.

Actuation and Detection of Mechanical Resonance:

In the present invention 4 different combinations can be used to excite and detect the resonance deflections of the resonating pixel plate (2):

-   -   Capacitive actuation and detection,     -   Capacitive actuation and piezoelectric/piezoresistive detection,     -   Piezoelectric actuation and capacitive detection,     -   Piezoelectric actuation and piezoelectric/piezoresistive         detection.

FIGS. 38-40 show the modal Finite Element Model (FEM) simulation of the center-fixed pixel (2) arrangement where the corners on the same diagonal deflect together. Thus, the driving capacitive electrode (8) which is the driving actuator of the plate (2) and the sensing capacitive electrode (9) which senses the motion of the plate, are placed to pick-up this motion with diagonal pads shorted. The placement of the pads solely depends on the deflection pattern of the mode shape. The pads should be placed under maximum-deflection regions of the mode shape of the resonating pixel plate (2) and the pads under in-phase (moving together) regions should be electrically connected. The deflecting plate should also be at an electrostatic potential. For this purpose, an electrical connection pad (7) is placed. As this is the preferred embodiment of the present invention other arrangements will have the same approach for capacitive actuation-detection.

For piezoresistive/piezoelectric actuation and detection, piezoactuators and piezoresistors should be placed on the resonating pixel plate (2) where maximum stress is induced. It is also possible to use hybrid approaches where detection is capacitive and actuation is piezoelectric, or detection is piezoelectric/piezoresistive and the actuation is capacitive.

Detection of Frequency Shift of the Mechanical Resonance:

In the present invention, 5 different methods to detect resonance frequency shifts, can be used as explained below:

-   -   Self-resonance with frequency counting: In self resonance         scheme, the detected motion signal is fed back to the actuation         mechanism where the phase relation satisfies the mechanical         resonance. Counting the frequency of the pixel plate (2) when it         is resonating directly gives the resonance frequency.     -   Phase Locked Loop (PLL) with frequency counting: In PLL, a         voltage controlled oscillator (VCO) generates the driving         signal. The motion is sensed through the detection mechanism and         a controller adjusts the frequency of the VCO to satisfy a phase         relation that results in mechanical resonance. Counting the         frequency of the VCO output when it is resonating directly gives         the resonance frequency.     -   Amplitude detection: The resonating pixel plate (2) can be         excited with a constant frequency signal, where the frequency of         the excitation is on the skirts of the frequency-amplitude         response curve of the resonating pixel plate (2). Thus,         depending on the shift of this response curve, the gain of the         mechanical pixel plate (2) shifts, which can be detected as an         amplitude change of the resonator.     -   Phase detection: The resonating pixel plate (2) can be excited         with a constant frequency signal, where the frequency of the         excitation is in the middle of the frequency-phase response         slope of the plate (2). Thus, depending on the shift of this         response curve, shifts in the phase between the motion of         mechanical pixel plate (2) and the applied excitation can be         detected using a phase detector.     -   Fixed-frequency excitation with feedback: The resonating pixel         plate (2) can be excited with a constant frequency signal and         the overall equivalent spring constant of the excited mode shape         can be modified (i.e., with electrostatic tuning) to obtain         resonance. The amount of spring constant correction gives the         amount of frequency shift.

Depending on the capacitive/piezo character of the actuation and detection mechanisms, one of the above methods can be utilized.

On-the-Fly Tuning of Sensitive Wavelength Band by Means of a Resonant Light Cavity:

Another aspect of IR detectors is the wavelength of the IR emission which the detector is sensitive to. The vibration based IR detector of the present invention, especially with the capacitive actuation and detection mechanisms, allows fine tuning of the sensitive wavelength by adjusting the gap between the resonating pixel plate (2) and the substrate (3). When a light beam with a wavelength of λ is trapped in a cavity which is sized λ/4, it accumulates (or resonates) in that cavity, which is also known as cavity resonance of light. FIG. 19 shows the pixel embodiment with L-shaped arms, segment-fixed at 2 edges. The gap between the plate and the substrate (shown with red arrows in the side view (b)) forms a cavity. Modifying this gap (i.e. electrostatically with dedicated electrodes) allows tuning of sensitive wavelength. 

1. A vibration based mechanical IR detector (10) to convert incident IR radiation to an easy-to-process form of information characterized by having more than one resonating pixel structure (1) consisting of; a resonating pixel plate (2), a pixel substrate (3) where the plate (2) is attached to, one or more anchors (4) and/or extension arms (5) and one or more cantilevers (6) that are attaching the plate (2) to the substrate (3), one or more driving capacitive electrode (8) which is the driving actuator of the plate (2), one or more sensing capacitive electrode (9) to pick-up the motion of the plate (2) and one or more electrical connection pads (7) to keep the plate (2) at an electrostatic potential. and an IR imaging method for measuring incoming IR radiation by means of mechanical resonance of the resonating pixels by; capacitive actuation and detection, capacitive actuation and piezoelectric/piezoresistive detection, piezoelectric actuation and capacitive detection, and piezoelectric actuation and piezoelectric/piezoresistive detection.
 2. Vibration based mechanical IR detector (10) and the IR imaging method of claim 1 are based on the; mechanical structure of the pixel and corresponding mode shapes, materials that the pixel structure is made up of, actuation and detection of mechanical resonance, detection of frequency shift of the mechanical resonance, and on-the-fly tuning of sensitive wavelength band by means of a resonant light cavity.
 3. Vibration based mechanical IR detector (10) of claim 1 can be embodied in 7 different plate (2)—anchor (4)/extension arm (5) combinations as; 4 corners fixed 2 corners fixed 4 edges segment-fixed 2 edges segment-fixed Cantilever 2 edges fixed Center fixed
 4. Upper and/or lower surfaces of the pixel plate (2) of claim 1 can be coated with an IR absorbing material.
 5. IR absorbing material of claim 4 can be of TiN (Titanium Nitride).
 6. IR absorbing material of claim 4 can be of a very thin metal or metal alloy that matches the impedance of free space (˜377 Ohm).
 7. The mode shapes of claim 1 are totally dependent on the shape of the plate (2) and the boundary conditions like size and positions of the extension arms (5) and anchorage (4) regions.
 8. The placement of the electrical connection pads (7) of claim 1 solely depends on the deflection pattern of the mode shape.
 9. The pads (7) of claim 1 should be placed under maximum-deflection regions of the mode shape of the resonating pixel plate (2).
 10. The pads (7) of claim 1 under in-phase deflection regions should be electrically connected.
 11. In order to obtain higher resolution, the pixel plate (2) of claim 1 should be thermally isolated from the substrate (3) it sits on by using extension arm (5) structures for extending the anchorage regions of the plate (2) in order to increase thermal resistance between the plate (2) and the substrate.
 12. All 7 plate (2)—anchor (4)/extension arm (5) combinations of claim 3 can be implemented with extension arm (5) structures.
 13. Mechanical structure of the preferred embodiment of the present invention of claim 1 is a center fixed pixel (2).
 14. The resonating pixel plate (2) of claim 1 should have high thermal coefficient of Young's Modulus and high thermal coefficient of expansion while the thermal conductivity of the pixel plate (2) and the anchors (4) or extension arms (5) should be as low as possible in order to obtain maximum sensitivity.
 15. The resonating pixel plate (2) of claim 1 should also be made up of a low-loss material such as a single crystal silicon or quartz in order to improve the quality factor of the mode shapes.
 16. The preferred embodiment of claim 13 is characterized by having anchors (4), extension arms (5) and/or cantilevers (6) and the substrate (3) made up of glass.
 17. The preferred embodiment of claim 13 is characterized by having a substrate (3) with metal padding on top that matches the impedance of free space.
 18. The preferred embodiment of claim 13 is characterized by having a resonating pixel plate (2) made up of silicon.
 19. Another embodiment of the present invention of claim 1 is characterized by having float zone silicon as the substrate (3) and a metal padding on top where the resonating pixel plate (2) can be bonded on a conductive anchor (4), which provides the bias potential to the resonating pixel plate (2).
 20. The IR imaging method of claim 1 is based on the incident IR radiation power that heats the resonating pixel plate (2) of which the resonance frequency shifts according to change in the geometric dimensions and/or change in the temperature dependent young's modulus of the pixel plate (2).
 21. Actuation and detection of mechanical resonance of claim 2 is capacitive actuation and detection in the preferred embodiment of the present invention.
 22. For piezoresistive/piezoelectric actuation and detection of claim 1, piezoactuators and piezoresistors should be placed on the resonating pixel plate (2) where maximum stress is induced.
 23. Use of hybrid approaches where detection is capacitive and actuation is piezoelectric, or detection is piezoelectric/piezoresistive and the actuation is capacitive for actuation and detection of mechanical resonance of claim 2 is possible.
 24. 5 different methods to detect resonance frequency shifts to be used for the detection of frequency shift of the mechanical resonance of claim 2 are; self-resonance with frequency counting, phase locked loop with frequency counting, amplitude detection, phase detection, and fixed-frequency excitation with feedback.
 25. In self resonance with frequency counting scheme of claim 24, the detected motion signal is fed back to the actuation mechanism where the phase relation satisfies the mechanical resonance.
 26. In self resonance with frequency counting scheme of claim 24, counting the frequency of the pixel plate (2) when it is resonating directly gives the resonance frequency.
 27. In phase locked loop with frequency counting scheme of claim 24, a voltage controlled oscillator generates the driving signal.
 28. In phase locked loop with frequency counting scheme of claim 24, the motion is sensed through the detection mechanism and a controller adjusts the frequency of the VCO to satisfy a phase relation that results in mechanical resonance.
 29. In phase locked loop with frequency counting scheme of claim 24, counting the frequency of the VCO output when it is resonating directly gives the resonance frequency.
 30. In amplitude detection scheme of claim 24, the resonating pixel plate (2) can be excited with a constant frequency signal, where the frequency of the excitation is on the skirts of the frequency-amplitude response curve of the resonating pixel plate (2)
 31. In amplitude detection scheme of claim 24, depending on the shift of the response curve, the gain of the mechanical pixel plate (2) shifts, which can be detected as an amplitude change of the resonator.
 32. In phase detection scheme of claim 24, the resonating pixel plate (2) can be excited with a constant frequency signal, where the frequency of the excitation is in the middle of the frequency-phase response slope of the plate (2).
 33. In phase detection scheme of claim 24, depending on the shift of the response curve, shifts in the phase between the motion of mechanical pixel plate (2) and the applied excitation can be detected using a phase detector.
 34. In fixed-frequency excitation with feedback scheme of claim 24, the resonating pixel plate (2) can be excited with a constant frequency signal and the overall equivalent spring constant of the excited mode shape can be modified to obtain resonance.
 35. In fixed-frequency excitation with feedback scheme of claim 24, the amount of spring constant correction gives the amount of frequency shift.
 36. Depending on the capacitive/piezo character of the actuation and detection mechanisms, one or more of the schemes of claim 24 can be utilized.
 37. On-the-fly tuning of sensitive wavelength band by means of a resonant light cavity of claim 1 is characterized by adjusting the gap between the resonating pixel plate (2) and the substrate (3). 